JPS5383483A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5383483A
JPS5383483A JP15919076A JP15919076A JPS5383483A JP S5383483 A JPS5383483 A JP S5383483A JP 15919076 A JP15919076 A JP 15919076A JP 15919076 A JP15919076 A JP 15919076A JP S5383483 A JPS5383483 A JP S5383483A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
film
imoerfect
avert
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15919076A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5549773B2 (en]
Inventor
Yunosuke Kawabe
Nobuhiro Sano
Tsutomu Akatsuka
Kuniaki Makabe
Akira Tabata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15919076A priority Critical patent/JPS5383483A/ja
Publication of JPS5383483A publication Critical patent/JPS5383483A/ja
Publication of JPS5549773B2 publication Critical patent/JPS5549773B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
JP15919076A 1976-12-28 1976-12-28 Production of semiconductor device Granted JPS5383483A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15919076A JPS5383483A (en) 1976-12-28 1976-12-28 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15919076A JPS5383483A (en) 1976-12-28 1976-12-28 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5383483A true JPS5383483A (en) 1978-07-22
JPS5549773B2 JPS5549773B2 (en]) 1980-12-13

Family

ID=15688267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15919076A Granted JPS5383483A (en) 1976-12-28 1976-12-28 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5383483A (en])

Also Published As

Publication number Publication date
JPS5549773B2 (en]) 1980-12-13

Similar Documents

Publication Publication Date Title
JPS53135263A (en) Production of semiconductor device
JPS5383483A (en) Production of semiconductor device
JPS5389374A (en) Production of semiconductor device
JPS5441681A (en) Manufacture for high frequency transistor
JPS52124860A (en) Electrode formation method for semiconductor devices
JPS5571055A (en) Semiconductor device and its manufacturing method
JPS52117079A (en) Preparation of semiconductor device
EP0067738A3 (en) Method of reducing encroachment in a semiconductor device
JPS5376766A (en) Production of semiconductor device
JPS53116787A (en) Production of semiconductor device
JPS5797643A (en) Manufacture of semiconductor device
JPS57196572A (en) Semiconductor device
JPS6489539A (en) Manufacture of semiconductor device
JPS53148992A (en) Manufacture of semiconductor device
JPS5382174A (en) Surface processing method for semiconductor device
JPS5244165A (en) Process for production of semiconductor device
JPS5389655A (en) Production of semiconductor device
JPS5754330A (en) Formation of silicon oxidized film
JPS5687346A (en) Manufacture of semiconductor device
JPS57190355A (en) Semiconductor device
JPS5249771A (en) Process for production of semiconductor device
JPS5691476A (en) Semiconductor
JPS5463674A (en) Production of mesa-type semiconductor device
JPS5494280A (en) Production of semiconductor device
JPS5516413A (en) Production of semiconductor device